Electromechanical devices utilizing thin Si diaphragms

Folding energetics in thin- ̄lm diaphragms

By G. Gioia1, A. DeSimone2, M. Ortiz3 and A. M. Cu i t i ~ no4 1Theoretical and Applied Mechanics, University of Illinois, Urbana, IL 61801, USA ([email protected]) 2Max Planck Institute for Mathematics in the Sciences, 04103 Leipzig, Germany Graduate Aeronautical Laboratories, California Institute of Technology, Pasadena, CA 91125, USA 4Mechanical and Aerospace Engineering, Rutgers University, P...

Super-high density Si quantum dot thin film utilizing a gradient Si-rich oxide multilayer structure.

A gradient Si-rich oxide multilayer (GSRO-ML) deposition structure is proposed to achieve super-high density Si quantum dot (QD) thin film formation while preserving QD size controllability for better photovoltaic properties. Our results indicate that the Si QD thin film using a GSRO-ML structure can efficiently increase the QD density and control the QD size. Its optical properties clearly pro...

Polycrystalline Si thin films and devices: I. Seed selection through ion channeling II. Thin-film transistors

Part I of this thesis investigates the ."seed selection through ion channeling" process, employed to modify the grain size and crystallographic texture of polycrystalline Si thin films deposited on SiO 2. In each of the three experiments, polycrystalline Si films prepared by the low-pressure chemical-vapor deposition technique were used as the starting material. Si self-implantation, at a fixed...

Realization of Micromachined - Electromechanical Devices for Wireless

performance of micro-electromechanical systems devices for space applications

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